Low Price Guarantee
We Take School POs
A User's Guide to Ellipsometry
Contributor(s): Tompkins, Harland G. (Author)

View larger image

ISBN: 0486450287     ISBN-13: 9780486450285
Publisher: Dover Publications
OUR PRICE: $16.10  

Binding Type: Paperback - See All Available Formats & Editions
Published: July 2006
Qty:

Annotation: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.


Click for more in this series: Dover Civil and Mechanical Engineering
Additional Information
BISAC Categories:
- Science | Nanoscience
- Technology & Engineering | Electrical
- Science | Physics - Optics & Light
Dewey: 620.112
LCCN: 2006040253
Series: Dover Civil and Mechanical Engineering
Physical Information: 0.56" H x 5.64" W x 8.5" L (0.66 lbs) 288 pages
Features: Illustrated, Index, Price on Product - Canadian, Table of Contents
 
Descriptions, Reviews, Etc.
Publisher Description:
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
 
Customer ReviewsSubmit your own review
 
To tell a friend about this book, you must Sign In First!